Overview

The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.

FS1012 Flow Sensor Module - Top
FS1012 Flow Sensor Module - Bottom
FS1012 - Single-Ended Circuit Example
FS1012 - Differential Circuit Example
FS1012 Flow Sensor Module - Top
FS1012 Flow Sensor Module - Bottom
FS1012 - Single-Ended Circuit Example
FS1012 - Differential Circuit Example
  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C

Documentation

= Featured Documentation
Type Title Date
Datasheet
FS1012 Datasheet
PDF 174 KB
End Of Life Notice
PLC# : 230018 End-of life process on select parts
PDF 1.43 MB
Application Note
Factors Influencing Accuracy of Thermal Flow Sensors
PDF 135 KB
End Of Life Notice
PLC# : 230001 End-of- Life (EOL) process on select part numbers
PDF 1.29 MB
Product Change Notice
PCN# : 210017 Change PCB Suppliers for Flow Sensors Products
PDF 148 KB
Product Brief
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family
PDF 236 KB
White Paper
Whitepaper - MEMS Mass Flow Sensor
PDF 478 KB
7 items

Design & Development

FS2012-EVK - Kit Box

SDAF0x

Evaluation
Learn More

Mass Flow Sensor Evaluation Kit

The FS2012-EVK mass flow sensor evaluation kit, featuring the FS2012 high performance and fully calibrated mass flow rate module for non-corrosive gas or liquid flow....

Featured Documents:
FloDemo Software v1.003

ECAD Models

Schematic symbols, PCB footprints, and 3D CAD models from SamacSys can be found by clicking on products in the Product Options table. If a symbol or model isn't available, it can be requested directly from the website.

Explore ECAD Models
Diagram of ECAD Models

Product Options

    Processing table
    Description
    Temp. Range
    Price (USD) | 1ku
    Buy / Sample
    Part Number
    FS1012-1001-LQ
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    memory
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    		Liquid, 0 to 0.5 SLPM 0 to 85°C
    FS1012-1002-LQ
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    memory
    view_in_ar
    		Liquid, 0 to 1.0 SLPM 0 to 85°C
    FS1012-1020-NG
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    memory
    view_in_ar
    		Gas, 0 to 2 SLPM 0 to 85°C 32.63
    FS1012-1100-NG
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    memory
    view_in_ar
    		Gas, 0 to 10 SLPM 0 to 85°C 27.57
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